MAC CAT-1006 FINAL

Vision Measuring Systems

UMAP Vision System TYPE2 Micro Form Measuring System

Ultrasonic Micro Probe UMAP Contact measurement of a small diameter and its section or contour is possible, which is difficult with a conventional Vision Measuring System or CMM. Capable of high accuracy, sophisticated, non-contact and contact measurement on one machine. With a minimum measuring force of 1 µN, it is not only less likely to mark workpiece surfaces, but also enables measurement of workpieces that are highly susceptible to deformation.

Micro probe, UMAP

Nominal diameter ø200 µm

Nominal diameter ø80 µm

Nominal diameter ø53 µm

Nominal diameter ø24 µm

Nominal diameter ø9 µm

Typical applications

ø70 µm

ø15 µm

ø30 µm

ø100 µm

ø300 µm

UMAP 107 Stylus

UMAP 101 Stylus

UMAP 103 Stylus

UMAP 110 Stylus

UMAP 130 Stylus

ø15 µm

ø30 µm

ø70 µm

Detection of surface principle

Contour measurement of a ø0.125 mm hole

ø100 µm

Amplitude

(1)

Stylus

ø300 µm

Duration

(1) In this drawing, the stylus is vibrating with micro amplitude. If it does not come into contact with the workpiece, the vibration state is maintained. (2) As the stylus comes into contact with the workpiece surface, the vibration amplitude decreases as the contact increases. When the decreasing amplitude falls below a certain level, a touch-trigger signal is generated.

Workpiece

Detection signal before workpiece contact

Amplitude

Amplitude reduction

(2)

Stylus

Duration

Measuring form of micro gear teeth

Workpiece

Detection signal after workpiece contact

SPECIFICATIONS

Model No.

Hyper UMAP 302

ULTRA UMAP 404

Items

185×200 mm 7”x8”

285×400 mm 11”x16”

X-axis×Y-axis

Measuring range (common to vision and UMAP )

UMAP 101 / 103 UMAP 107 / 110 UMAP 130 E UX, MPE , E UYMPE

175 mm / 6.9” 180 mm / 7” 185 mm / 7.3”

Z-axis

(0.8 + 2L/1000) µm (1.5 + 2L/1000) µm (1.4 + 3L/1000) µm (1.5 + 3L/1000) µm (2.0 + 4L/1000) µm

(0.35 + L/1000) µm (1.5 + 2L/1000) µm (0.5 + 2L/1000) µm

Vision

E UZ,MPE E UXY,MPE E 1x , E 1Y

Vision measuring accuracy*

Stream (optional)

- -

M

E 2XY

Optical Magnification

2.5x objective & middle magnification tube lens 5x objective & middle magnification tube lens

UMAP

E 1x , E 1Y

(1.7 + 3L/1000) µm

(1.5 + 3L/1000) µm

3 σ ≤ 0.1 µm σ ≤ 0.08 µm σ ≤ 0.12 µm

Dimensional measurement within FOV

-

σ ≤ 0.1 µm σ ≤ 0.15 µm

Repeatability

UMAP 101 / 103 / 107 UMAP 110 / 130

Refer to UMAP Vision System Brochure ( E14000 ) for more details.

UMAP

* Inspected to a Mitutoyo standard. L=length between two arbitrary points (mm)

M-9

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