Accessories for Measuring Microscope
FS-70 SERIES 378 — Microscope Unit for Semiconductor Inspection
Technical Data Focus Adjustment Method:
•Bright field, differential interference contrast (DIC) and polarized observations are optional with FS70Z and FS70. The FS70L and FS70L4 do not support the DIC method. • By employing an inward revolver, the long working distance objectives provide excellent operability. • An ergonomic design with superb operability: the FS70 employs the erect-image optical system (the image in the field of view has the same orientation as the specimen) and enlarged fine focus adjustment wheel with rubber-grip coarse adjustment knob.
• The optical system that was developed for the best-selling FS60 models was further enhanced for the FS70 models. It is ideal as a microscope unit of a prober station for semiconductors. (All models CE marked.) • The FS70L supports three types of YAG laser wavelength ranges (1064nm, 532nm and 355nm), while the FS70L4 supports two types of wavelength ranges (532nm and 266nm), thus expanding a scope of laser applications, allowing laser-cutting of thin films used in semiconductors and liquid crystal substrates. However, Mitutoyo assumes no responsibility for the performance and/or safety of the laser system used with Mitutoyo microscopes. Careful examination is recommended in selecting a laser-emission unit.
With concentric coarse and fine focusing wheels (right and left) 50mm travel range 0.1mm/rev. for fine adjustment, 3.8mm/rev. for coarse adjustment
Range:
Trinocular tube Image:
Erect image
Siedentopf type, adjustment range: 2-3" / 51-76mm
Pupil distance:
Field number:
24
Tilt angle:
0º - 20º (only -TH, -THS models) Reflective illumination for bright field (Koehler illumination, with aperture diaphram) 12V100W fiber optics, non-stepped adjustment, light guide length 1.5m, power consumption 150W M Plan Apo, M Plan Apo SL, G Plan Apo
Illumination system:
Light source (optional):
Objectives (optional):
Optional Accessories For a complete listing of accessories see Microscope Units and Objectives brochure, E4191-378
FS70Z
FS70L
FS70L4
Model No. Order No. Short base model No. Order No.
FS70 378-184-1 FS70-S 378-184-2
FS70-TH 378-184-3 FS70-THS 378-184-4
FS70Z 378-185-1 FS70Z-S 378-185-2
FS70Z-TH 378-185-3 FS70Z-THS 378-185-4
FS70L 378-186-1 FS70L-S 378-186-2
FS70L-TH 378-186-3 FS70L-THS 378-186-4
FS70L4 378-187-1 FS70L4-S 378-187-2
FS70L4-TH 378-187-3 FS70L4-THS 378-187-4
MICROSOPE UNITS AND OBJECTIVES (UV, NUV, VISIBLE & NIR REGION)
I
Focus adjustment
50mm travel range with concentric coarse (3.8mm/rev) and fine (0.1mm/rev) focusing wheels (right / left)
Image
Erect image
Pupil distance Field number
Siedentopf type, adjustment range: 2 - 3” / 51 - 76mm
24
Tilt angle
— 0° - 20°
— 0° - 20°
— 0° - 20°
— 0° - 20°
Catalog No. E14020
100/0 or 0/100
100/0 or 0/100
Optical pass ratio
50/50
50/50
100/0 or 0/100
100/0 or 0/100
Refer to No. ( E14020 ) for more details.
Protective filter
— 1X
—
Built-in laser beam filter
Built-in laser beam filter
Tube lens
1X - 2X zoom
1X
1X
—
—
1064/532/355nm
532/266nm
Applicable laser
C-mount receptacle (with green filter switch)
Camera mount
C-mount (using optional adapter B)
Use a laser with TV port.
Illumination system, optional Objective, optional (for observation) Objective, optional (for laser-cutting)
Reflective illumination for bright field (Koehler illumination, with aperture diaphragm) 12V 100W fiber optics, non-stepped adjustment, light guide length: 1.5m, power consumption 150W
M Plan Apo, M Plan Apo SL, G Plan Apo
M/LCD Plan NIR, M/LCD Plan NUV
—
M Plan UV
Loading weight* 32lbs/14.5kg 30lbs/13.6kg 31lbs/14.1kg 29lbs/13.2kg 31lbs/14.2kg 30lbs/13.5kg 31lbs/13.9kg 29lbs/13.1kg Mass (main unit) 13lbs/6.1kg 15.5lbs/7.1kg 14.5lbs/6.6kg 16.5lbs/7.5kg 14lbs/6.4kg 15.5lbs/7.2kg 14.5lbs/6.7kg 16.5lbs/7.5kg *Loading weight on optical tube excluding weight of objective lenses and eyepieces.
Need Calibration?
I-28
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