Laser Scan Micrometer
Optional Accessories • Multifunctional display unit, LSM-6200 :
• Ensures ±1.0 µm accuracy over the entire measuring range (0.3 to 30 mm). • The industry’s first narrow-range accuracy performance in this measuring range of ±(0.6+0.1 D) μm is available for high-accuracy measurement. LSM-503S Measuring Unit SERIES 544 — 0.3 mm to 30 mm Measuring Unit
Order No. Remarks 542-072A English mm/in English user's manual Display type
• Panel-mount type display unit, LSM-5200 :
Order No. 544-047
Remarks
English user's manual
• Standard calibration gage set (ø1.0, ø30.0): 02AGD130 • Adjustable workstage: 02AGD490
SPECIFICATIONS Order No. (Laser only)
544-536
• Air blower: 02AGD240 • Workstage: 02AGD270 • Extension signal cable (max. 25 m)
Package No. (Laser w/LSM 6200 display)
64PKA119
Applicable laser standards
IEC, FDA
Order No. 02AGN780A 02AGN780B 02AGN780C 02AGN780D
Cable length
User's manual Measuring range
English version
5 m 10 m 15 m 20 m
.012" to 1.18" (0.3 to 30mm)
Resolution
.000001" to .005" (0.02 to 100μm) (selectable)
Repeatability* 1
±0.11μm ±1.0μm
Whole range Small range
Accuracy* 2 (20°C)
±(0.6+0.1 D)μm* 3
• Extension relay cable (max. 5 m)
Positional error* 4 Measuring area* 5
±1.5μm
02AGC150A 02AGC150B 02AGC150C
1 m 3 m 5 m
10×30mm (0.3 to 30mm)
Scanning rate
3200 scans/s 650nm (Visible)
Laser wavelength Laser scanning speed
226m/s
Temperature
0 to 40°C
Operating environment
Humidity
RH 35 to 85% (no condensation)
Protection Level IP64* 6 *1: Determined by the value of ±2 ( : standard deviation) when measuring ø30mm at the interval of 0.32 sec. (average 1024 times). *2: Center of the measuring range for cylindrical workpieces outside diameter. *3: D=Difference in diameter between the master gage and workpiece (Unit: mm). *4: An error of the outside diameter due to variation in workpiece position either in the optical axis direction or in the scanning direction. *5: The area given by [optical axis direction]×[scanning direction]. *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.
G
LSM-506S Measuring Unit SERIES 544 — 1 mm to 60 mm Measuring Unit
• Ensures ±3 µm accuracy over the entire measuring range (1 to 60 mm). • The industry’s first narrow-range accuracy performance in this measuring range of ±(1.5+0.5 D) μm is available for high-accuracy measurement.
Optional Accessories • Multifunctional display unit, LSM-6200 :
Order No. Remarks 542-072A English mm/in English user's manual Display type
• Panel-mount type display unit, LSM-5200 :
SPECIFICATIONS Order No. (Laser only)
Order No. 544-047
Remarks
English user's manual
544-538
Package No. (Laser w/ LSM 6200 display)
64PKA120
Applicable laser standards
IEC, FDA
• Standard calibration gage set (ø0.1, ø60.0): 02AGD140 • Adjustable workstage: 02AGD520 • Air blower: 02AGD250 • Extension signal cable (max. 25 m)
User's manual Measuring range
English version
.040" to 2.36" (1 to 60mm)
Resolution
.000002" to .005" (0.05 to 100μm) (selectable)
Repeatability* 1
±0.36μm
Order No. 02AGN780A 02AGN780B 02AGN780C 02AGN780D
Cable length
Whole range Small range
±3μm
Accuracy* 2 (20°C)
5 m 10 m 15 m 20 m
±(1.5+0.5 D)μm* 3
Positional error* 4 Measuring area* 5
±4μm
20×60mm (1 to 60mm)
Scanning rate
3200 scans/s 650nm (Visible)
• Extension relay cable (max. 5 m)
Laser wavelength Laser scanning speed
452m/s
02AGC150A 02AGC150B 02AGC150C
1 m 3 m 5 m
Temperature
0 to 40°C
Operating environment
Humidity
RH 35 to 85% (no condensation)
Protection Level IP64* 6 *1: Determined by the value of ±2 ( : standard deviation) when measuring ø60mm at the interval of 0.32 sec. (average 1024 times). *2: Center of the measuring range for cylindrical workpieces outside diameter. *3: D=Difference in diameter between the master gage and workpiece (Unit: mm) *4: An error of the outside diameter due to variation in workpiece position either in the optical axis direction or in the scanning direction. *5: The area given by [optical axis direction]×[scanning direction]. *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction.
G-36
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