Linear Gages
LGH (0.01/0.005 μm resolution) SERIES 542 — High-accuracy/resolution Type
Optional Accessories • Measuring stand: 971750
• This series has achieved very high accuracy combined with a resolution of 0.01/0.005 μm (according to model), practically equivalent to that of a laser interferometer, and a wide measuring range of 10 mm. • A compact body design makes a significant contribution to a downsizing of this gage itself, which is best suited for calibration/evaluation of master gages as well as measurement of high-precision parts and as a length measuring sensor incorporated into high-precision positioning/control units.
• A low measuring force model is available for those applications where measurement of easily deformed or damaged workpieces is required. • Every LGH Series gage is bundled with a dedicated counter.
300
110
ø50
Gage mounting hole ø15H7
Unit: mm
• Spindle lifting cable: 971753
• This model is equipped with a newly developed ultra-high precision transmission type linear encoder, achieving the outstanding resolution of 0.005 µm (5 nm). • Exceptional measuring accuracy of 0.1 µm has been attained over the wide measuring range of 10 mm. This series is most suited for calibration/evaluation of master gages where its wide measuring range is a great advantage.
• This model is equipped with a newly developed optical reflection- type linear encoder, achieving an excellent resolution of 0.01 µm, a measuring accuracy of 0.2 µm and a measuring range of 10 mm at a low price. • Maximum operating speed has been improved by a factor of 2.8 times (250 mm/s → 700 mm/s) while maintaining very high accuracy.
(500)
43
12 (stroke)
Return-speed adjustment knob
Unit: mm
G
• I/O connector: 02ADB440
Gage head: 542-715A
Gage head: 542-720A
• SENSORPAK
TYPICAL APPLICATIONS Master gage calibration/evaluation
Inspection of high-precision parts
Dedicated counter
Needle contact-point mounting example
DIMENSIONS
Note: Refer to page G-16 for more details. • Rubber boot: 238772 (Spare for 542-715A and 542-720A )
Unit: mm
542-716A
542-721A
Dedicated counter (set)
Cable Assy (2 m)
(37.6)
(25*)
19.4
138
45.4
Cable (2 m)
Fixation of power cord
Connector (detachable)
Connector for lifting cable
Connector for lifting cable
ø15h6 0
Linear Displacement Sensors LINEAR GAGE
ø15h6 0
-0.011
-0.011
Stem dia for fixation
Stem dia for fixation
144
(Tilt angle when stand equipped)
542-716 (low measuring force) LGH-1010C-B-EH Rubber boot not equipped
542-721 (low measuring force) LGH-0510C-B-EH Rubber boot not equipped
18
18
10
10
40
40
20
20
542-715 (standard) LGH-1010-B-EH
Carbied-tipped, Sø3 901312
Carbide sphere SR5 120058
542-720 (standard) LGH-0510-B-EH
Bulletin No. 2326
156 (Stand equipped)
Refer to the Linear Gage Brochure ( 2326 ) for more details.
* Minimum bending radius or minimum dressed dimension
G-9
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